发明名称 MEASURING TIP COMPRISING AN INTEGRATED MEASURING TRANSDUCER
摘要 A measuring device used for registering a test signal originating from a circuit structure applied to a wafer. The measuring device provides at least one test probe and at least one test transformer. The at least one test transformer is connected to the at least one test probe in an electrically conductive manner. In this context, the test transformer is arranged on the test probe.
申请公布号 EP2545387(A2) 申请公布日期 2013.01.16
申请号 EP20110707996 申请日期 2011.01.20
申请人 ROHDE & SCHWARZ GMBH & CO. KG 发明人 DEUTINGER, ANDREA;HECHTFISCHER, GERD;EVERS, CHRISTIAN
分类号 G01R1/067 主分类号 G01R1/067
代理机构 代理人
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