发明名称 |
LASER PRODUCED PLASMA EUV LIGHT SOURCE |
摘要 |
<p>A device is disclosed herein which may include a plasma generating system comprising a source of target material droplets and a laser producing a beam irradiating the droplets at an irradiation region, the plasma producing EUV radiation, wherein the droplet source comprises a fluid exiting an orifice and a sub-system producing a disturbance in the fluid which generates droplets having differing initial velocities causing the spacing between at least some adjacent droplets to decrease as the droplets travel to the irradiation region.</p> |
申请公布号 |
EP2544766(A1) |
申请公布日期 |
2013.01.16 |
申请号 |
EP20110753705 |
申请日期 |
2011.03.01 |
申请人 |
CYMER, INC. |
发明人 |
VASCHENKO, GEORGIY, O.;ERSHOV, ALEXANDER, I.;SANDSTROM, RICHARD, L. |
分类号 |
A61N5/06;B82Y10/00;G03F7/20;H05G2/00 |
主分类号 |
A61N5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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