SUCTION DEVICE OF MINUTE PARTICLES

摘要

A suction device for sucking minute particles is provided to optimize a sucking distance and a sucking angle of an air suction unit according to characteristics of a cleaning target and an installing state of an injection nozzle. An air suction unit(110) includes a suction hole(111) for sucking air containing fine contaminants and a suction transfer path for forming a connecting path. A pump connection unit(120) is installed apart from the air suction unit. The pump suction unit includes a pump connecting part(121) connected to a vacuum pump and an exhaust transfer path for forming the connecting path. A refractive connection unit(130) is coupled with the air suction unit and the pump connection unit in order to form an air flow path connected to the suction transfer path of the air suction unit and the exhaust transfer path of the pump connection unit. The refractive connection unit is made of a flexible tube material.