| 摘要 |
An IGBT having a good balance between high switching speed and low on-resistance. Specifically disclosed is an IGBT 10 in which a defect layer 25 is formed in an n layer 102 in an active region 20 and formed in a p-type substrate 101 in a non-active region 40. In other words, the defect layer 25 in the active region 20 is at a shallower position than the defect layer 25 in the non-active region 40 when viewed from the surface. Due to this configuration, the switching speed is increased by reducing the amount of holes injected in the non-active region 40 in the IGBT 10. Meanwhile, the reduction of hole injection amount in the active region 20 is smaller than that in the non-active region 40, and thus increase in the on-resistance is suppressed at that time. |
