OPTICAL ELEMENT, METHOD OF MANUFACTURING OPTICAL ELEMENT, MULTILAYERED REFLECTION FILM, OPTICAL WAVEGUIDE DEVICE, DIFFRACTION GRATING, AND OPTICAL RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide an optical element having a DLC film containing silicon. SOLUTION: In the range of 200-850 nm in wavelength, a refractive index of a DLC-Si film is higher than that of the DLC film as silicon content increases within the range of 4-17 at%. In the range of 850-1800 nm, the refractive index of the DLC-Si film is lower than that of the DLC film as the silicon content increases within the range of 4-12 at%. Therefore, the optical characteristics of the DLC-Si film can be controlled to any level by adjusting the silicon content. Also, the optical element for developing excellent optical functions can be provided by using the DLC-Si film. COPYRIGHT: (C)2009,JPO&INPIT