发明名称 POROUS AND NON-POROUS NANOSTRUCTURES
摘要 <p>Disclosed are a variety of porous and non-porous wire-like structures of microscopic and nanoscopic scale. For instance, disclosed are structures that comprise a porous object that comprises: (i) a first region; and (ii) a second region adjacent to the first region along an axis of the object, where the first region has at least one porous property different from that of the second region. Also disclosed are structures that include: (i) a high resistivity silicon; and (ii) a cross-section that is substantially perpendicular to an axis of the object. Also disclosed are methods of making and using such structures. For instance, the present invention provides methods of making a porous object by: (i) obtaining an etchable substrate; (ii) forming on a surface of the substrate a patterned porosification assisting metal layer that has at least one opening; and (iii) subsequently exposing the substrate to a first etching solution and a second etching solution to form respectively a first region and a second region of a porous object.</p>
申请公布号 EP2545585(A2) 申请公布日期 2013.01.16
申请号 EP20110792806 申请日期 2011.03.09
申请人 BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM 发明人 FERRARI, MAURO;LIU, XUEWU;CHIAPPINI, CIRO;FAKHOURY, JEAN, RAYMOND
分类号 H01L29/06;H01L21/306;H01L23/48;H01L23/532 主分类号 H01L29/06
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