DEVICE AND METHOD FOR MANUFACTURING HIGH-PURITY POLYCRYSTALLINE SILICON FOR SOLAR CELL

摘要

PURPOSE: An apparatus and a method for manufacturing high purity polycrystalline silicon are provided to prevent impurities from moving to the upper side of melt by moving a heater around a fixed crucible for a solidification process to suppress a shaking of a crucible. CONSTITUTION: A chamber(10) includes insulation materials(15) for an insulation from the outside. A support(20) is vertically installed on the upper side of a bottom plate(14) toward the inside of the chamber. A top heater(31) is located on the upper side of a crucible in the chamber. A lateral top heater(33) and a lateral bottom heater(35) are located around the crucible in the chamber. A heat exchanger(40) is formed in the support side and cools the lower side of the crucible.