发明名称
摘要 <p>There is provided a thin-film transistor including at least a substrate, a gate electrode, a gate insulating layer, an oxide semiconductor layer, a source electrode, a drain electrode and a protective layer, wherein the oxide semiconductor layer is an amorphous oxide containing at least one of the elements In, Ga and Zn, the gate electrode-side carrier density of the oxide semiconductor layer is higher than the protective layer-side carrier density thereof, and the film thickness of the oxide semiconductor layer is 30 nm±15 nm.</p>
申请公布号 JP5121254(B2) 申请公布日期 2013.01.16
申请号 JP20070050004 申请日期 2007.02.28
申请人 发明人
分类号 H01L29/786;G02F1/1368;H01L21/336 主分类号 H01L29/786
代理机构 代理人
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