发明名称 |
Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus |
摘要 |
A vapor deposition apparatus and method for efficiently performing a deposition process to form a thin film with improved characteristics on a substrate, and a method of manufacturing an organic light-emitting display apparatus. The vapor deposition apparatus includes a chamber (110) including an exhaust port (111); a stage (120) disposed in the chamber, and including a mounting surface (121) on which the substrate (101) is to be disposed; an injection portion (130) including at least one injection opening (131,132) through which a gas is injected in a direction parallel with a surface of the substrate on which the thin film is to be formed; and a plasma generator (180) disposed apart from the substrate to face the substrate. |
申请公布号 |
EP2546386(A1) |
申请公布日期 |
2013.01.16 |
申请号 |
EP20120169161 |
申请日期 |
2012.05.23 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
SEO, SANG-JOON;HUH, MYUNG-SOO;KIM, SEUNG-HUN;KIM, JIN-KWANG;SONG, SEUNG-YONG |
分类号 |
C23C16/455;C23C16/458 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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