发明名称 ANTIFUSE OF SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 PURPOSE: An antifuse of a semiconductor device and a method for forming the same are provided to reduce the occupation area of the antifuse and to improve the productivity of a net die. CONSTITUTION: A pillar(101a) is protruded on a semiconductor substrate. A first bit line metal layer(126) is buried in the lower part for the pillar. The first oxide film is formed in the contact part of the first bit line metal layer and the pillar. A first junction area(120) is diffused into the pillar. A first barrier metal layer surrounds the sidewall of the first bit line metal layer.
申请公布号 KR20130005760(A) 申请公布日期 2013.01.16
申请号 KR20110067363 申请日期 2011.07.07
申请人 SK HYNIX INC. 发明人 KIM, JUNG SAM
分类号 H01L27/02 主分类号 H01L27/02
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