| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To restrict power consumption in control of a resistance heater, and to suppress degradation in resolution and/or increase in error in measurement of power, and the like, of the resistance heater. <P>SOLUTION: A temperature control device 5 includes a temperature-dependent resistance heater 11, a PWM controller 71, a PWM switch SW1, differential amplifier 55 and an ADC 56. When a PWM signal in the PWM controller 71 is on, the PWM switch SW1 passes a current by the temperature dependent resistance heater 11. When the PWM signal in the PWM controller 71 is in off state, the current will not pass through the temperature-dependent resistance heater 11 by the PWM switch SW1. The PWM controller 71 newly sets the duty cycle of the PWM signal so as to make the temperature of the temperature-dependent resistance heater 11 to a setting temperature, based on signals from the differential amplifier 55 and the ADC 56, when the PWM signal is on. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
