| 摘要 |
An apparatus for guiding a substrate is provided to a space and the number of modules for adjusting an interval by installing the module between guide modules. A substrate guide apparatus(100) comprises a first guide module(10), a second guide the module(30), and an interval module(50). The first and a second guide modules guide the sides of a transferred substrate(5), and the interval module controls the interval between the second guide module and the first guide module. The first guide module comprises a first guide part(11) and a first gaping frame(17), and the first guide part comprises a first supporting frame(13) and a first guide roller(15). The second guide module comprises the second guide unit(31) and the second gaping frame(37), and the second guide unit comprises the second supporting frame(33) and the second guide roller(35).
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