发明名称
摘要 The present invention relates to an exposure device and an exposure method. The exposure device 100 feeds a body (T) to be exposed with preset width and film shape to an exposure bench 50, and exposes a circuit pattern of a mask (M) on the body. The exposure body has a pressing board 42 pressing the body; an image recognization section 54 for observing a first correction recognization mark (AM) formed on the body and a second correction recognization mark (MM) formed on the circuit pattern; and a first moving section 43 moving the pressing board and the image recognization section in preset width direction of the body.
申请公布号 JP5117243(B2) 申请公布日期 2013.01.16
申请号 JP20080084251 申请日期 2008.03.27
申请人 发明人
分类号 G03F9/00;G03F7/20 主分类号 G03F9/00
代理机构 代理人
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