发明名称 |
METHOD FOR EVALUATING A QUALITY OF WAFER OR SINGLE CRYSTAL INGOT AND METHOD FOR CONTROLLING A QUALITY OF SINGLE CRYSTAL INGOT |
摘要 |
PURPOSE: A method for evaluating a quality of a wafer or single crystal ingot and a method for controlling the quality of the single crystal ingot are provided to correctly predict the quality of a wafer by using a scoring on all prime regions. CONSTITUTION: A copper haze evaluation is performed on a wafer. The copper haze evaluation is performed on the piece of single crystalline ingot. A copper haze scoring is performed on the result of copper haze evaluation. A first thermal process is performed on one part of the piece of the single crystalline ingot. A second thermal process is performed on the other part of the piece of the single crystalline ingot. [Reference numerals] (AA) Crystal defect area |
申请公布号 |
KR20130005566(A) |
申请公布日期 |
2013.01.16 |
申请号 |
KR20110067040 |
申请日期 |
2011.07.06 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
JANG, YUN SEON;HONG, YOUNG HO;JUNG YO HAN;KIM, SE HUN |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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