CASE FOR SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a case for a semiconductor, capable of suppressing the diffusion of gas originated from a resin into the inside of the case. SOLUTION: The case includes: a case body which has an inner side face made of a resin and stores a reticle or a wafer; and a diamond-like carbon film for coating the inner side face and preventing the diffusion of an evaporated material contained in the resin from the inner side face. COPYRIGHT: (C)2010,JPO&INPIT