| 摘要 |
<p>PURPOSE: A CIGS solar battery manufacturing device and method are provided to evaporate a light absorption layer of uniform thickness by preventing oxygen and hydrogen bubbles to be included in the light absorption layer. CONSTITUTION: A plating liquid(132) evaporates a light absorption layer on a substrate. Oxygen and hydrogen bubbles are discharged to outside while the light absorption layer is evaporated on the substrate. A receiving part(131) stores the plating liquid. An electrode(133) is installed in the receiving part. A power supply part supplies a power source to the substrate and the electrode. A vacuum chamber provides vacuum atmosphere. A vacuum pump is arranged at one side of the vacuum chamber. A heater is placed inside the vacuum chamber. [Reference numerals] (120) Vacuum pump</p> |
