CALIBRATION SYSTEM, REFLECTION MEMBER, AND INSPECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a calibration system that is related to an inspection system using a time correlation camera and calibrates the position and attitude to control a surface to be inspected.SOLUTION: A calibration system for an inspection system of an embodiment comprises: a reflection member including a reflection surface that has a plurality of shape discontinuity parts generating phase discontinuities provided in a time-correlation image; an interval detection part that detects an interval between the phase discontinuities in a time-series image obtained by photographing the reflection surface, and a parameter calculation part that calculates a parameter corresponding to at least one of the position and attitude of a surface to be inspected during inspection on the basis of the detected interval.SELECTED DRAWING: Figure 1