发明名称 |
METHODS AND COMPOSITIONS FOR DOPING SILICON SUBSTRATES WITH MOLECULAR MONOLAYERS |
摘要 |
Compositions and methods for doping silicon substrates by treating the substrate with a diluted dopant solution comprising tetraethylene glycol dimethyl ether (tetraglyme) and a dopant-containing material and subsequently diffusing the dopant into the surface by rapid thermal annealing. Diethyl-1-propylphosphonate and allylboronic acid pinacol ester are preferred dopant-containing materials, and are preferably included in the diluted dopant solution in an amount ranging from about 1% to about 20%, with a dopant amount of 4% or less being more preferred. |
申请公布号 |
EP2545583(A1) |
申请公布日期 |
2013.01.16 |
申请号 |
EP20110753897 |
申请日期 |
2011.03.08 |
申请人 |
DYNALOY, LLC |
发明人 |
POLLARD, KIMBERLY, DONA;RECTOR, ALLISON, C. |
分类号 |
H01L21/225;H01L21/22 |
主分类号 |
H01L21/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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