<p>A technology of inspecting a photoexcited carrier generation area of a photo device (90) in a non-contact manner is provided. An inspection apparatus (100) inspects a photovoltaic cell panel (90) in which the photo device is formed. The inspection apparatus includes an irradiation part (12) that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface (91S) side and a detecting part (13) that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light.</p>
