发明名称 |
ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD |
摘要 |
PURPOSE: An antenna, a dielectric window, a plasma treatment device and a plasma treatment method are provided to modify a protection layer by detecting the energy line like energy beam from the protection layer. CONSTITUTION: An antenna comprises a dielectric window(16), and a slot plate(20) installed at one direction of the dielectric window. Another side of the dielectric window comprises a planation surface surrounded a first depressed portion of illusion. Another side of the dielectric window comprises several second depressed portion formed inside a planation surface to surround center location of the planation surface. Each center location of a second depressed portion is overlapped inside several slots at the slot plate in the vertical direction of the main surface of the slot plate. [Reference numerals] (10) Exhaust device; (100) Gas supply source; (AA) Other element; (BB) Controller; (CC) Power supply |
申请公布号 |
KR20130006351(A) |
申请公布日期 |
2013.01.16 |
申请号 |
KR20120073543 |
申请日期 |
2012.07.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MATSUMOTO NAOKI;YOSHIKAWA WATARU;YOSHIKAWA JUN;MOYAMA KAZUKI;ISHIBASHI KIYOTAKA;MORITA OSAMU;TANIKAWA TAKEHIRO |
分类号 |
H05H1/46;H01L21/205;H01L21/3065 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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