| 摘要 |
PROBLEM TO BE SOLVED: To spray gas to an observation object while keeping the temperature and relative humidity of the gas to a target temperature and a target relative humidity.SOLUTION: An atmosphere adjustment device 1 includes a steam generation unit 103, an air transport pipe 109 and a heat exchange unit 111. The steam generation unit 103 generates gas having a steam amount according to a target temperature and a target relative humidity. The air transport pipe 109 transports gas generated by the steam generation unit 103. The heat exchange unit 111 is provided at the end part on the gas outflow side of the air transport pipe 109, and adjusts the temperature and relative humidity of gas to the target temperature and the target relative humidity.SELECTED DRAWING: Figure 1 |
