MANUFACTURE METHOD OF PRESSURE SENSOR FOR BLOOD VESSEL, PRESSURE SENSOR PRODUCED BY THE SAME AND STENT HAVING SAME PRESSURE SENSOR

摘要

The present invention relates to a method for manufacturing a blood vessel pressure sensor which can measure the amount of blood in vessel by using a change of a resonance frequency according to a change of capacitance. More particularly, the present invention relates to a method of manufacturing a blood vessel pressure sensor which can be flexibly attached to a curved stent and can improve manufacturing yield without a separate alignment process between a capacitor first electrode and a capacitor second electrode, a pressure sensor produced by the same and a stent having pressure sensor. The method includes a step of preparing a wafer; a step of forming a void layer; and a step of sealing a hole.