| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element capable of adjusting the influence of a residue at the bottom of an arm on vibration.SOLUTION: The sensor element includes a piezoelectric substance, an excitation electrode disposed on the surface of a drive arm 11D of the piezoelectric substance, and a detection electrode disposed on the surface of a detection arm of the piezoelectric substance. The piezoelectric substance includes a plurality of projections 14, 14A, and 14B that project from a base 9 and are supported by the base 9 in the plan view. The plurality of projections 14, 14A, and 14B include the first projection 14A that is located adjacently to the drive arm 11D and is linked to the bottom of the drive arm 11D via a residue 21.SELECTED DRAWING: Figure 4 |
