发明名称 OPTICAL APPARATUS FOR EXPOSURE USING POLYCON TYPE LIGHT CHAMBER
摘要 <p>PURPOSE: An optical device for exposure using a polygonal shape light chamber is provided to minimize light loss by preventing light from being re-entered. CONSTITUTION: An optical device for exposure using a polygonal shape light chamber(1) comprises a main body(10), a plurality of light sources(20), and a condensing lens(30). The main body comprises a bottom body(12) and a top body(11). The cross section of the top body is formed into a polygonal shape. The bottom body is connected to the end of the top body. Apertures(12a) are formed at one side of the bottom body. The plurality of light sources is installed on each side among the inner surfaces of the top body.</p>
申请公布号 KR20130005750(A) 申请公布日期 2013.01.16
申请号 KR20110067341 申请日期 2011.07.07
申请人 PARK, HEUNG GYUN 发明人 PARK, HEUNG GYUN;JANG, DU CHEON
分类号 G03F7/20;G02B27/00;H01L21/027 主分类号 G03F7/20
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