| 摘要 |
<p>The micro-technical system has a substrate (2) and a sealing (3), where the substrate and the sealing form a cavity (4a) and another cavity (4b). The different pressures (p1,p2) are present in the former cavity and the latter cavity. The micro-technical functional elements (5a,5b) are arranged in the former cavity and in the latter cavity. An independent claim is also included for a method for manufacturing a micro-technical system.</p> |
