发明名称 SUBSTRATE STORAGE CONTAINER AND METHOD FOR MANUFACTURING THE SAME
摘要 A substrate storage container includes a container main body, first supporting parts and second supporting parts. The container main body includes a back wall and a pair of side walls in order to store a substrate between the side walls. The first supporting parts are opposingly disposed on each side wall in order to support a peripheral edge part of the substrate. The second supporting parts are opposingly disposed on each side wall in order to support the peripheral edge part of the substrate and positioned between the back wall and the first supporting parts. The first supporting parts and the second supporting parts are covered with a resin layer having a lower frictional property than that of the container main body.
申请公布号 KR101222792(B1) 申请公布日期 2013.01.15
申请号 KR20060044443 申请日期 2006.05.17
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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