发明名称 Techniques for manufacturing solar cells
摘要 Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may be comprise disposing the solar cell downstream of an ion source; disposing a mask between the ion source and the solar cell, the mask including a front surface, a back surface, and at least one aperture extending in an aperture direction from the front surface to the back surface; and directing ions from the ion source to the solar cell along an ion beam path and through the at least one aperture of the mask, where the ion beam path may be non-parallel relative to the aperture direction.
申请公布号 US8354653(B2) 申请公布日期 2013.01.15
申请号 US20090555917 申请日期 2009.09.09
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;ANELLA STEVEN M. 发明人 ANELLA STEVEN M.
分类号 G21K5/00;H01J37/08 主分类号 G21K5/00
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