CONTROL APPARATUS, A SUBSTRATE TREATING METHOD, A SUBSTRATE TREATING SYSTEM, A METHOD OF OPERATING A SUBSTRATE TREATING SYSTEM, A LOAD PORT CONTROL APPARATUS, AND A SUBSTRATE TREATING SYSTEM HAVING THE LOAD PORT CONTROL APPARATUS

摘要

PURPOSE: A control apparatus, a substrate treating method, a substrate treating system, a method for operating a substrate treating system, a load port control apparatus, and a substrate treating system having the load port control apparatus are provided to reduce costs. CONSTITUTION: A substrate processing apparatus(5) includes a substrate processing unit(11) a load port(13) and an internal buffer(15). The substrate processing unit processes a substrate(W) selected from a FOUP(3). The load port gives and takes the FOUP between the substrate processing apparatus and a carrier transport system(7). The internal buffer is installed between the substrate processing unit and the load port. A host computer(9) communicates the substrate processing apparatus with the carrier transport system. [Reference numerals] (9) Host computer