发明名称 METHODS UTILIZING MICROWAVE RADIATION DURING FORMATION OF SEMICONDUCTOR CONSTRUCTIONS
摘要 Some embodiments include methods in which microwave radiation is used to activate dopant and/or increase crystallinity of semiconductor material during formation of a semiconductor construction. In some embodiments, the microwave radiation has a frequency of about 5.8 gigahertz, and a temperature of the semiconductor construction does not exceed about 500° C. during the exposure to the microwave radiation.
申请公布号 KR101222283(B1) 申请公布日期 2013.01.15
申请号 KR20117008094 申请日期 2009.08.20
申请人 发明人
分类号 H01L21/265 主分类号 H01L21/265
代理机构 代理人
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