APPARATUS FOR THIN LAYER DEPOSITION

摘要

PURPOSE: An organic layer deposition apparatus is provided to form multiple organic layers at one time and to improve the manufacture yield and deposit efficiency. CONSTITUTION: A deposition source(110) discharges the deposition material. The deposition source includes a crucible(112) and a cooling block(111). A deposition source nozzle unit(120) includes multiple deposition source nozzles. A patterning slit sheet(150) faces the deposition source nozzle unit. A first and a second align pattern(502,503) are formed on the substrate(500).