| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device with high accuracy in tilt angle of a sensor element and high reliability in electrical connection of the sensor element with an other element while suppressing manufacturing cost, and to provide its manufacturing method. <P>SOLUTION: A sensor device includes a pedestal 4 and an angle velocity sensor element 1 mounted on the upper face of the pedestal 4. The upper face of the pedestal 4 has a tilted face 4A tilted to the lower face. The angle velocity sensor element 1 is mounted on the tilted face 4A, having an electrode 30 formed on its top surface. A tilted face 20A on the top surface of the angle velocity sensor element 1 is tilted so that a tilt angle with respect to the lower face of the pedestal 4 becomes small and the electrode 30 is formed on this tilted face 20A. <P>COPYRIGHT: (C)2013,JPO&INPIT |
