| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an improved electrode, and a fixture for the electrode in a pressure transducer. <P>SOLUTION: A pressure transducer assembly has: a first body; a second body; a diaphragm; and an electrode. The first body and the diaphragm form a first chamber, and the second body and the diaphragm form a second chamber. The electrode is arranged in the first chamber. Capacitance between the electrode and the diaphragm represents pressure difference between the chambers. The electrode is suspended from a hub, and spoke attachment is performed to it. In some embodiment, the electrode is completely metal. The electrode may have a disk made of ceramics, on which a conductive film is formed. The disk is connected to a housing having a rod made of ceramics. In addition, a transducer has an expansion member with a low thermal coefficient connected to the housing in order to reduce twist according to temperature variation. <P>COPYRIGHT: (C)2013,JPO&INPIT |
