| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflection device that can prevent bounced particles from intruding into a processing chamber. <P>SOLUTION: The reflection device 36 includes a reflection plate 38 including: a first disk-shaped reflecting surface member 41 disposed in an exhaust manifold 16 to face a TMP 18; and a second annular reflecting surface member 42 disposed on a peripheral edge of the first reflecting surface member 41, and having a plane angle set to orient the second surface to the rotating shaft 43 of the TMP 18. <P>COPYRIGHT: (C)2013,JPO&INPIT |
