发明名称 MANUFACTURING METHOD OF LAMINATED PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method which allows for efficient formation of an external electrode having a constant film quality and film thickness on three surfaces of a laminated piezoelectric element without using any device of special structure, and without requiring a removal process of the external electrode. <P>SOLUTION: While juxtaposing a plurality of laminated piezoelectrics 9 each having a first external electrode (first side electrode) on the first surface (first side surface) 94 so that the second surface (second side surface) 95 forms an angle with a surface that is parallel with the surface of a target 13 releasing metal particles, coating is performed so as to form a second external electrode (second side electrode) 951 and a wiring electrode 921 simultaneously. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013008820(A) 申请公布日期 2013.01.10
申请号 JP20110140271 申请日期 2011.06.24
申请人 NEC TOKIN CORP 发明人 MATSUZAWA MANABU
分类号 H01L41/22;C23C14/34;H01L41/083;H01L41/187 主分类号 H01L41/22
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