| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method which shorten the inspection time of infrared inspection of a large-sized liquid crystal panel to improve productivity. <P>SOLUTION: The defect inspection device for detecting a defect position of wiring in a liquid crystal panel 2 includes: a probe 8 which applies a voltage to a terminal part of the liquid crystal panel 2; prove moving means 9 which moves the probe 8 to the terminal part of the liquid crystal panel; a first infrared sensor which photographs an entire surface of the liquid crystal panel; a second infrared sensor which photographs a local part of the liquid crystal panel; and sensor moving means 4 which moves the second infrared sensor to each position of the liquid crystal panel. The first infrared sensor comprises a plurality of infrared cameras. <P>COPYRIGHT: (C)2013,JPO&INPIT |
