| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor with a compact and simple configuration, and to provide a semiconductor device and a portable equipment. <P>SOLUTION: In the angular velocity sensor 100 which includes a ring oscillator 11 and a detection circuit 13, the ring oscillator 11 and the detection circuit 13 are formed on a semiconductor substrate, the ring oscillator 11 has a delay path including inverters IVV1 to INV3, and the detection circuit 13 detects the angular velocity of rotation from variation of the oscillation frequency of the ring oscillator 11. <P>COPYRIGHT: (C)2013,JPO&INPIT |
