PROCESS FOR THE PREPARATION OF TRISILYLAMINE FROM MONOCHLOROSILANE AND AMMONIA
摘要
The present invention relates to a special process for preparing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention also relates to a plant in which such a process can advantageously be carried out.
申请公布号
WO2013004423(A1)
申请公布日期
2013.01.10
申请号
WO2012EP59019
申请日期
2012.05.15
申请人
EVONIK DEGUSSA GMBH;HOPPE, CARL-FRIEDRICH;RAULEDER, HARTWIG;LUNT-RIEG, INGRID;GOETZ, CHRISTIAN
发明人
HOPPE, CARL-FRIEDRICH;RAULEDER, HARTWIG;LUNT-RIEG, INGRID;GOETZ, CHRISTIAN
