| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical deflector capable of detecting rocking in a two-dimensional direction of a reflection surface without decreasing a rotation angle when rocking the reflection surface in the two-dimensional direction. <P>SOLUTION: An optical deflector 1 includes a first supporting portion 4 for supporting a mirror portion 2 having a reflection surface 2a; first piezoelectric actuators 31 and 32 for rocking the mirror portion 2 around a first axis Y to the first supporting portion 4; a second supporting portion 6 for supporting the first supporting portion 4; and second piezoelectric actuators 51 and 52 for rocking the first supporting portion 4 around a second axis X to the second supporting portion 6. On the first supporting portion 4, first detecting portion 71y and 72y for detecting first vibrations transmitted by piezoelectric driving of the first piezoelectric actuators 31 and 32, and second detecting portions 71x and 72x for detecting second vibrations by piezoelectric driving of the second piezoelectric actuators 51 and 52 are disposed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
