发明名称 OFFSET SCREEN FOR SHALLOW SOURCE/DRAIN EXTENSION IMPLANTS, AND PROCESSES AND INTEGRATED CIRCUITS
摘要 A process of integrated circuit manufacturing includes providing (32, 33) a spacer on a gate stack to provide a horizontal offset over the channel region for otherwise-direct application (34) of a PLDD implant dose in semiconductor, additionally depositing (35) a seal substance to provide a screen thickness vertically while thereby augmenting the spacer on the gate stack to provide an increased offset horizontally from the gate stack and form a horizontal screen free of etch, and subsequently providing (36) an NLDD implant dose for NLDD formation. Various integrated circuit structures, devices, and other processes of manufacture, and processes of testing are also disclosed.
申请公布号 US2013009251(A1) 申请公布日期 2013.01.10
申请号 US201213484592 申请日期 2012.05.31
申请人 TEXAS INSTRUMENTS INCORPORATED;JAIN AMITABH 发明人 JAIN AMITABH
分类号 H01L27/092;H01L21/336;H01L21/66;H01L21/8238 主分类号 H01L27/092
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