发明名称 PATTERN PRINTING METHOD AND DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To exactly print a pattern of a mask to a non-magnetic metal plate. <P>SOLUTION: In a pattern printing method for printing a pattern of a mask to a photosensitive film of a non-magnetic metal plate by performing alignment of a mask (6) to a perpendicularly suspended non-magnetic metal plate (1), after that, adhering the mask to the non-magnetic metal plate, and irradiating light from the mask, in the alignment, a pair of frames (11, 12) one of which the mask is arranged is provided face to face so as to sandwich the non-magnetic metal plate, current (I) is supplied so that a magnetic flux moves downward to electromagnets (18) arranged at both side ends of the frames, the non-magnetic metal plate is pulled downward with eddy current (U) to be generated on the surface of the non-magnetic metal plate and tensile force (F) to be generated by the eddy current and a magnetic field of the electromagnets, the alignment is performed while the tensile force acts, and after that, the mask is adhered to the non-magnetic metal plate. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013007821(A) 申请公布日期 2013.01.10
申请号 JP20110139340 申请日期 2011.06.23
申请人 DAINIPPON PRINTING CO LTD 发明人 UEHATA FUMIHIKO
分类号 G03F7/20;H01L23/50 主分类号 G03F7/20
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