| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vertical light-emitting element in which oscillation of high order transverse mode light is suppressed. <P>SOLUTION: The vertical light-emitting element comprises: a lower multilayer reflection film and an upper multilayer reflection film oscillating the light; an intermediate layer formed under the upper multilayer reflection film and including a layer having a composition different from that of the upper multilayer reflection film; and electrodes formed so that the intermediate layer is held therebetween in the cross section parallel with the resonance direction of light, and the upper end is located higher than the upper surface of the intermediate layer. After forming the electrodes so that the intermediate layer is held therebetween, the upper multilayer reflection film is laminated on the intermediate layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
