| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated magnetic thin film and a magnetic component capable of suppressing increase in ferromagnetic resonance line width and extending an operation frequency, using a granular magnetic material with a high ferromagnetic resonance frequency. <P>SOLUTION: A laminated magnetic thin film 10 has a structure of alternately laminating a granular magnetic layer 12 with magnetic particles 16 dispersed in an insulator medium 14 and an insulation layer 18, and Pd for promoting crystal orientation is added in the magnetic particles 16. The added amount of Pd is preferably 20% or more to the Co-Fe magnetic particles 16 in the laminated magnetic thin film 10 having the granular magnetic layer 12 of CoFePdSiO and the insulating layer 18 of SiO<SB POS="POST">2</SB>. The lamination structure of the granular magnetic layer 12 and the insulating layer 18 suppresses increase in a ferromagnetic resonance line width resulting from dispersion in a direction of a magnetization easy axis by suppressing particle size distribution of the magnetic particle 16 to constantly keeps intervals of the magnetic particles 16 in a thickness direction of the film and promoting crystal orientation of the magnetic particles 16 by addition of the Pd. <P>COPYRIGHT: (C)2013,JPO&INPIT |
