| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which allows the shortening of the discharge delay time while the rise in PDP discharge voltage is avoided. <P>SOLUTION: The method comprises: putting the inside of a vacuum chamber 10 into a vacuum atmosphere; bringing MgO fine particles 3 of a transfer member 5 into contact with the surface of a protection film of a processing object 27, which is composed of a SrCaO film to deposit the particles thereon; and after removing the transfer member therefrom, carrying the processing object 27 to the outside from the vacuum chamber 10. The transfer member 5 is prepared by: depositing, on a substrate 4 for the fine particles, a fluid dispersion or dispersion paste having the MgO fine particles 3 dispersed in an evaporative solution or evaporative paste, by spraying or coating; evaporating and removing the evaporative solution or evaporative paste by heating; and thereafter leaving the resultant substrate in the vacuum chamber 10. After using one transfer member 5 to deposit the MgO fine particles 3 on a predetermined number of processing objects 27, the transfer member 5 is replaced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
