| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a seed holding member having a low electrical resistivity in the direction of current flow and exhibiting both an ability of holding a seed (seed rod) during operation and ease of breaking after operation, to provide a polycrystalline silicon production device using the seed holding member, and to provide a method for producing the seed holding member. <P>SOLUTION: A graphite-made seed holding member 6, which is attached to an electrode part 5 placed at the bottom of a furnace for producing polycrystalline silicon by Siemens method and which holds the bottom end portion of a seed 4 serving as a seed rod, is formed of an extrusion material, and is configured such that the direction of extrusion of the extrusion material is substantially parallel with the seed (the axial direction A of the seed holding member 6 substantially coincides with the direction of extrusion). The bending strength of the seed holding member 6 is preferably 10-25 MPa, and more preferably 15-25 MPa. <P>COPYRIGHT: (C)2013,JPO&INPIT |
