发明名称 |
METHOD FOR PRODUCING CRYSTAL AND CRYSTAL |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new method for producing crystal for performing a homoepitaxial growth by a sublimation method in which a base substrate is not fixed to a material having different coefficients of thermal expansion. <P>SOLUTION: The method for producing crystal includes: an arrangement step (St1) of arranging a raw material body 2 formed of a raw material of a single crystal and a single crystal seed substrate 3 on an upper surface 2a of the raw material body 2 so as to come into contact with the raw material body 2 in a crystal growth container 1; and a crystal growth step (St2) of growing a crystal 4 by depositing a raw material gas on an upper surface 3a of the single crystal seed substrate 3, the raw material gas is made by raising the temperature in the crystal growth container 1 to sublimate a part of a raw material of the raw material body 2. The single crystal seed substrate 3 and the crystal 4 are formed of a material having the same chemical composition. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013006740(A) |
申请公布日期 |
2013.01.10 |
申请号 |
JP20110140556 |
申请日期 |
2011.06.24 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
ARAKAWA SATOSHI;TANIZAKI KEISUKE;YAMAMOTO YOSHIYUKI |
分类号 |
C30B29/38;C30B23/06 |
主分类号 |
C30B29/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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