| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easy, inexpensive, and clean method for manufacturing porous silicon with a large surface area, especially suitable for a negative electrode material of lithium batteries. <P>SOLUTION: The method is to execute the following steps in the order of: (1) exposing particular or film-shaped silicon to an atmosphere having a relative humidity of 75% or more at a temperature of 40°C or more for 20 hours or more to form an oxide film at least on the surface of the silicon; and (2) removing the oxide film by a hydrofluoric acid. <P>COPYRIGHT: (C)2013,JPO&INPIT |
