| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deflection element and an alignment method for performing more exact alignment. <P>SOLUTION: An alignment pattern 6 which is constituted of first and second patterns 61, 62 is provided. Thus, when the alignment pattern 6 is irradiated with belt-like light with a frequency axis in parallel with an X-axis, light intensity of light to be reflected by the first pattern 61 and light intensity of light to be reflected by the second pattern 62 become the same when a MEMS mirror array chip 5 is not displaced in the Y-axis direction, and these pieces of light intensity become different from each other when the MEMS mirror array chip 5 is displaced in the Y-axis direction. Then, light intensity in two frequencies separated from a frequency at the center in a wavelength spectrum of the reflected light from the alignment pattern 6 by a predetermined value to both high and low sides is measured, and a position of the MEMS mirror array chip 5 in the Y-axis direction is adjusted so that the pieces of light intensity become the same. <P>COPYRIGHT: (C)2013,JPO&INPIT |
