发明名称 ELECTRIC ACTUATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an electric actuator in which particles can be prevented from leaving the body. <P>SOLUTION: The electric actuator 10 comprises: a body 11 consisting of an elongated housing; a slider 12 moving reciprocally in the longitudinal direction of the body 11; an aperture 13 formed in the side surface of the body 11 corresponding to the passage of movement of the slider 12; and a dust seal band 14 provided to cover the aperture 13. The electric actuator 10 is further provided with a pair of electrodes 21 projecting outward from the body 11 to hold the aperture 13 therebetween and extending in the longitudinal direction of the body 11. A positive potential is generated in the upper electrode 21b of the pair of electrodes 21, and a negative potential is generated in the lower electrode 21a of the pair of electrodes 21. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013008835(A) 申请公布日期 2013.01.10
申请号 JP20110140460 申请日期 2011.06.24
申请人 TOKYO ELECTRON LTD 发明人 WAKABAYASHI SHINJI
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
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