| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern forming device capable of forming more and excellent patterns, and further to provide a pattern forming method and a program for forming a pattern. <P>SOLUTION: A pattern forming device related to one embodiment sequentially transfers a pattern formed on a template to a plurality of transfer regions on a substrate by using a transfer region that includes a plurality of subregions as a unit. The pattern forming device comprises an acquiring section, a classifying section, a summing section, and a transferring section. The acquiring section acquires detection information of defective portions that exist in the substrate. The classifying section classifies the plurality of transfer regions into first transfer regions in which the defective portions do not exist and second transfer regions in which defective portions exist from the detection information acquired by the acquiring section. For the second transfer regions, the summing section sums frequency of occurrence of the defective portions for each position of the plurality of subregions in the plurality of transfer regions. The transferring section performs transfer of the second transfer regions in which the defective portions exist in subregions of positions with high frequency of occurrence of the defective portions at first by the template on the basis of a summing result summed by the summing section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
