CONTROL APPARATUS, A SUBSTRATE TREATING METHOD, A SUBSTRATE TREATING SYSTEM, A METHOD OF OPERATING A SUBSTRATE TREATING SYSTEM, A LOAD PORT CONTROL APPARATUS, AND A SUBSTRATE TREATING SYSTEM HAVING THE LOAD PORT CONTROL APPARATUS

摘要

A control apparatus in a substrate treating system with a substrate treating apparatus having a physical load port for receiving pods for storing substrates, and a carrier transport system for transporting the pods to and from the physical load port. The control apparatus includes a virtual load port control device for allotting a virtual load port to the physical load port, and instructing the carrier transport system to perform a transporting operation to and from the virtual load port on an assumption that the virtual load port really exists.